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1. (WO2018197861) HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH SUSPENDED SENSOR ARRANGEMENT

Pub. No.:    WO/2018/197861    International Application No.:    PCT/GB2018/051072
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Wed Apr 25 01:59:59 CEST 2018
IPC: G01P 15/097
Applicants: CAMBRIDGE ENTERPRISE LTD
Inventors: SESHIA, Ashwin Arunkumar
ZOU, Xudong
Title: HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH SUSPENDED SENSOR ARRANGEMENT
Abstract:
The invention provides a resonant sensor comprising: a substrate; one or more proof masses suspended from the substrate to allow for movement of the one or more proof masses along a sensitive axis; a first resonant element having a first end and a second end, the first resonant element extending between the first end and the second end along the sensitive axis, wherein the first end is connected to the one or more proof masses through a non-inverting lever and the second end is connected to the one or more proof masses through an inverting lever; and an electrode assembly positioned adjacent to the first resonant element. A resonant sensor in accordance the invention comprises a resonant element that is suspended between two proof masses or between two portions of a single proof mass, and so is not connected directly to the substrate to isolate the resonant element from thermal stress.