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1. (WO2018197860) HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH ELECTROSTATIC CONTROL OF PROOF MASS

Pub. No.:    WO/2018/197860    International Application No.:    PCT/GB2018/051071
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Wed Apr 25 01:59:59 CEST 2018
IPC: G01P 15/097
G01P 21/00
G01P 15/08
Applicants: CAMBRIDGE ENTERPRISE LTD
Inventors: ZOU, Xudong
SESHIA, Ashwin Arunkumar
Title: HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER WITH ELECTROSTATIC CONTROL OF PROOF MASS
Abstract:
There is provided a resonant sensor comprising: a substrate; a proof mass suspended from the substrate to allow for relative movement between the proof mass and the substrate along at least one sensitive axis; at least one resonant element coupled to the proof mass; an electrode assembly adjacent to the at least one resonant element; drive and sense circuitry connected to the electrode assembly configured to drive the electrode assembly to cause the at least one resonant element to resonate, wherein a measure of acceleration of the proof mass can be determined from changes in the resonant behaviour of the at least one resonant element; at least one substrate electrode on the substrate, adjacent to the proof mass; and electric circuitry connected to the substrate electrode configured to apply a voltage to the substrate electrode providing an electrostatic force on the proof mass. The substrate electrode may be used to provide a number of different functions.