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1. (WO2018197857) HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER
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Pub. No.: WO/2018/197857 International Application No.: PCT/GB2018/051068
Publication Date: 01.11.2018 International Filing Date: 24.04.2018
IPC:
G01P 15/097 (2006.01) ,G01C 19/5733 (2012.01)
G PHYSICS
01
MEASURING; TESTING
P
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION OR SHOCK; INDICATING PRESENCE OR ABSENCE OF MOVEMENT;  INDICATING DIRECTION OF MOVEMENT 
15
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
02
by making use of inertia forces
08
with conversion into electric or magnetic values
097
by vibratory elements
G PHYSICS
01
MEASURING; TESTING
C
MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
19
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
56
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
5719
using planar vibrating masses driven in a translation vibration along an axis
5733
Structural details or topology
Applicants:
CAMBRIDGE ENTERPRISE LTD [GB/GB]; The Old Schools Trinity Lane Cambridge Cambridgeshire CB2 1TN, GB
Inventors:
ZOU, Xudong; CN
SESHIA, Ashwin Arunkumar; GB
Agent:
REDDIE & GROSE LLP; The White Chapel Building 10 Whitechapel High Street London Greater London E1 8QS, GB
Priority Data:
1706732.327.04.2017GB
Title (EN) HIGH PERFORMANCE MICRO-ELECTRO-MECHANICAL SYSTEMS ACCELEROMETER
(FR) ACCÉLÉROMÈTRE DE MICROSYSTÈMES ÉLECTROMÉCANIQUES À HAUTE PERFORMANCE
Abstract:
(EN) There is provided a resonant sensor comprising: a substrate; a proof mass suspended from the substrate by one or more flexures to allow the proof mass to move relative to the frame along a sensitive axis; a first and a second resonant element connected between the frame and the proof mass; wherein the proof mass is positioned between the first and the second resonant element along the sensitive axis, and wherein the first and the second resonant elements have a substantially identical structure to one another; and drive and sensing circuitry comprising: a first electrode assembly coupled to first drive circuitry configured to drive the first resonant element in a first mode; a second electrode assembly coupled to second drive circuitry configured to drive the second resonant element in a second mode, different to the first mode; and a sensing circuit configured to determine a measure of acceleration.
(FR) L'invention concerne un capteur résonant comprenant : un substrat ; une masse étalon suspendue à partir du substrat par une ou plusieurs flexions pour permettre à la masse étalon de se déplacer par rapport au cadre le long d'un axe sensible ; un premier et un second élément résonant reliés entre le cadre et la masse étalon ; la masse étalon étant positionnée entre le premier et le second élément résonant le long de l'axe sensible, et les premier et second éléments résonants présentant une structure sensiblement identique l'un par rapport à l'autre ; et des ensembles circuit d'attaque et de détection comprenant : un premier ensemble d'électrodes couplées à des premiers circuits d'attaque configurés pour attaquer le premier élément résonant dans un premier mode ; un second ensemble d'électrodes couplées à des seconds circuits d'attaque configurés pour attaquer le second élément résonant dans un second mode, différent du premier mode ; et un circuit de détection configuré pour déterminer une mesure d'accélération.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)