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1. (WO2018197702) POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES

Pub. No.:    WO/2018/197702    International Application No.:    PCT/EP2018/060954
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 28 01:59:59 CEST 2018
IPC: H01J 37/32
C23C 14/34
H01J 37/34
H02M 7/00
Applicants: TRUMPF HÜTTINGER GMBH + CO. KG
Inventors: ENGELSTAEDTER, Jan Peter
HEINTZE, Moritz
SWIATNICKI, Jakub
Title: POWER CONVERTER UNIT, PLASMA PROCESSING EQUIPMENT AND METHOD OF CONTROLLING SEVERAL PLASMA PROCESSES
Abstract:
Power converter unit (1, 1') capable to convert an electrical input power into a bipolar output power and to deliver this output power to at least two independent plasma processing chambers (9a, 9b.. 9n), the unit (1, 1') comprising : one power input port (2) for connection to an electrical power delivering grid (7), at least two, preferably more than two, power output ports (3a, 3b,.. 3n) each for connection to one of the plasma process chambers (9a, 9b,... 9n), a control device (4) configured to control the unit (1, 1') to deliver the bipolar output power to the power output ports (3a, 3b,.. 3n), using control parameters of at least one of: power, voltage, current, excitation frequency, or threshold for protective measures, by obtaining a full set of desired values for the parameters for the output ports (3a, 3b,.. 3n), calculating whether the power converter unit (1, 1') is capable of delivering every desired parameter to every for the output ports (3a, 3b,.. 3n), and if this is the case, calculating a sequence of pulses of power delivery to the output ports (3a, 3b,.. 3n) in order to supply the power to the plasma processes.