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1. (WO2018197389) MATERIAL TESTING BY MEANS OF ANGLE-VARIABLE ILLUMINATION
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Pub. No.: WO/2018/197389 International Application No.: PCT/EP2018/060294
Publication Date: 01.11.2018 International Filing Date: 23.04.2018
IPC:
G01B 11/25 (2006.01) ,G01N 21/88 (2006.01) ,G01N 21/956 (2006.01) ,G06T 7/00 (2017.01)
G PHYSICS
01
MEASURING; TESTING
B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
11
Measuring arrangements characterised by the use of optical means
24
for measuring contours or curvatures
25
by projecting a pattern, e.g. moiré fringes, on the object
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
84
Systems specially adapted for particular applications
88
Investigating the presence of flaws, defects or contamination
95
characterised by the material or shape of the object to be examined
956
Inspecting patterns on the surface of objects
G PHYSICS
06
COMPUTING; CALCULATING; COUNTING
T
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
7
Image analysis, e.g. from bit-mapped to non bit-mapped
Applicants:
CARL ZEISS AG [DE/DE]; Carl-Zeiss-Str. 22 73447 Oberkochen, DE
Inventors:
STOPPE, Lars; DE
MILDE, Thomas; DE
TOTZECK, Michael; DE
Agent:
NEUSSER, Sebastian; DE
Priority Data:
10 2017 108 874.126.04.2017DE
Title (EN) MATERIAL TESTING BY MEANS OF ANGLE-VARIABLE ILLUMINATION
(FR) CONTRÔLE DE MATÉRIAU AVEC UN ÉCLAIRAGE À ANGLE VARIABLE
(DE) MATERIALPRÜFUNG MIT WINKELVARIABLER BELEUCHTUNG
Abstract:
(EN) The invention relates to an optical system (100), comprising an illumination module (111), which is designed to illuminate a sample object (180, 181) with at least one angle-variable illumination geometry. The optical system also comprises an imaging optics, which is designed to generate, on a detector (114), an image of the sample object (180, 181) illuminated with the at least one angle-variable illumination geometry, and the detector (114), which is designed to detect at least one representation of the sample object (180, 181) on the basis of the image. The optical system further comprises a control unit, which is designed to determine a result image on the basis of a transfer function and the at least one image.
(FR) L'invention concerne un système (100) optique comprenant un module d'éclairage (111) qui est mis au point pour éclairer un objet formant échantillon (180, 181) avec au moins une géométrie d'éclairage à angle variable. Le système optique comprend également une optique de reproduction qui est mise au point pour générer une image de reproduction de l'objet formant échantillon (180, 181) éclairé avec la ou les géométries d'éclairage à angle variable sur un détecteur (114). Le système optique comprend également le détecteur (114) qui est mis au point pour détecter sur la base de l'image de reproduction au moins une image de l'objet formant échantillon (180, 181). Le système optique comprend en outre une commande qui est mise au point pour définir, sur la base d'une fonction de transmission et de la ou des images, une image de résultat.
(DE) Optisches System (100) umfasst ein Beleuchtungsmodul (111), das eingerichtet ist, um ein Probenobjekt (180, 181) mit mindestens einer winkelvariablen Beleuchtungsgeometrie zu beleuchten. Das optische System umfasst auch eine Abbildungsoptik, die eingerichtet ist, um ein Abbild des mit der mindestens einen winkelvariablen Beleuchtungsgeometrie beleuchteten Probenobjekts (180, 181) auf einem Detektor (114) zu erzeugen, sowie den Detektor (114), der eingerichtet ist, um basierend auf dem Abbild mindestens ein Bild des Probenobjekts (180, 181) zu erfassen. Das optische System umfasst ferner eine Steuerung, die eingerichtet ist, um basierend auf einer Übertragungsfunktion und dem mindestens einen Bildein Ergebnisbild zu bestimmen.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)