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1. (WO2018197191) PROCESS FOR CLEANING OPTICAL ELEMENTS FOR THE ULTRAVIOLET WAVELENGTH RANGE

Pub. No.:    WO/2018/197191    International Application No.:    PCT/EP2018/058979
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue Apr 10 01:59:59 CEST 2018
IPC: B08B 5/00
B08B 7/00
G03F 7/20
G02B 27/00
Applicants: CARL ZEISS SMT GMBH
Inventors: FORCHT, Konstantin
ROGALSKY, Olaf
AMENT, Irene
Title: PROCESS FOR CLEANING OPTICAL ELEMENTS FOR THE ULTRAVIOLET WAVELENGTH RANGE
Abstract:
Proposed for cleaning optical elements for the ultraviolet wavelength range having at least one metal-containing layer on a surface is a process comprising the steps of: - supplying activated hydrogen to the surface having the metal-containing layer; subsequently supplying inert gas having an H2O volume fraction of below 5 ppm, preferably below 1 ppm, particularly preferably below 0.2 ppm. To this end, an optical system (1) may comprise a housing (122), a means for supply (161) of activated hydrogen, a means for supply (162) of inert gas having an H2O volume fraction of below 5 ppm and a discharge means (163) for pumping gas out of the housing (122).