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1. (WO2018197144) OPTIMIZING A SEQUENCE OF PROCESSES FOR MANUFACTURING OF PRODUCT UNITS
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Pub. No.: WO/2018/197144 International Application No.: PCT/EP2018/057961
Publication Date: 01.11.2018 International Filing Date: 28.03.2018
IPC:
G03F 7/20 (2006.01) ,G05B 19/418 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
G PHYSICS
05
CONTROLLING; REGULATING
B
CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
19
Programme-control systems
02
electric
418
Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control (DNC), flexible manufacturing systems (FMS), integrated manufacturing systems (IMS), computer integrated manufacturing (CIM)
Applicants:
ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324 5500 AH Veldhoven, NL
Inventors:
WILDENBERG, Jochem, Sebastiaan; NL
JOCHEMSEN, Marinus; NL
JENSEN, Erik; NL
WALLERBOS, Erik, Johannes, Maria; NL
RIJNIERSE, Cornelis, Johannes; NL
RAJASEKHARAN, Bijoy; NL
WERKMAN, Roy; NL
SCHOONUS, Jurgen, Johannes, Henderikus, Maria; NL
Agent:
PETERS, John; NL
Priority Data:
17168734.628.04.2017EP
Title (EN) OPTIMIZING A SEQUENCE OF PROCESSES FOR MANUFACTURING OF PRODUCT UNITS
(FR) OPTIMISATION D'UNE SÉQUENCE DE PROCESSUS DE FABRICATION D'UNITÉS DE PRODUIT
Abstract:
(EN) A method for optimizing a sequence of processes for manufacturing of product units, includes: associating (406) measurement results of performance parameters (fingerprints) with the recorded process characteristics (context); obtaining (408) a characteristic (context) of a previous process (e.g. deposition) in the sequence already performed on a product unit; obtaining (410) a characteristic (context) of a subsequent process (exposure) in the sequence to be performed on the product unit; determining (412) a predicted performance parameter (fingerprint) of the product unit associated with the sequence of previous and subsequent processes by using the obtained characteristics to retrieve measurement results of the performance parameters (fingerprints) corresponding to the recorded characteristics; and determining (414, 416) corrections to be applied (418) to future processes (e.g. exposure, etch) in the sequence to be performed on the product unit, based on the determined predicted performance parameter.
(FR) L'invention concerne un procédé d'optimisation d'une séquence de processus de fabrication d'unités de produit, comprenant les étapes suivantes : association (406) de résultats de mesure de paramètres de performance (empreintes numériques) aux caractéristiques (contexte) de processus enregistrées ; obtention (408) d'une caractéristique (contexte) d'un processus précédent (par exemple dépôt) dans la séquence déjà exécutée sur une unité de produit ; obtention (410) d'une caractéristique (contexte) d'un processus ultérieur (exposition) dans la séquence à exécuter sur l'unité de produit ; détermination (412) d'un paramètre de performance (empreinte numérique) prédit de l'unité de produit associée à la séquence de processus précédents et suivants en utilisant les caractéristiques obtenues pour récupérer des résultats de mesure des paramètres de performance (empreintes numériques) correspondant aux caractéristiques enregistrées ; et détermination (414, 416) des corrections à appliquer (418) aux futurs processus (par exemple exposition, gravure) dans la séquence à exécuter sur l'unité de produit, en se basant sur le paramètre de performance prédit déterminé.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)