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1. (WO2018197009) VACUUM SYSTEM AND METHOD OF DEPOSITING ONE OR MORE MATERIALS ON A SUBSTRATE

Pub. No.:    WO/2018/197009    International Application No.:    PCT/EP2017/060240
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 29 01:59:59 CEST 2017
IPC: C23C 14/12
C23C 14/24
C23C 14/50
C23C 14/56
H01J 37/18
H01L 51/00
Applicants: APPLIED MATERIALS, INC.
HEIMEL, Oliver
Inventors: HEIMEL, Oliver
Title: VACUUM SYSTEM AND METHOD OF DEPOSITING ONE OR MORE MATERIALS ON A SUBSTRATE
Abstract:
A vacuum system (100) for depositing one or more materials on a substrate is described. The vacuum system (100) comprises a first transport system (110) configured to transport a substrate (10) along a main transport path (101) in a main transport direction (P), and at least one deposition module (104) extending in a transverse direction (T) with respect to the main transport direction (P). The first transport system (110) is configured to hold the substrate (10) in an orientation which is essentially parallel to the transverse direction (T) during the transport. Further, a method of depositing one or more materials on a substrate is described, particularly by evaporation.