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1. (WO2018197008) METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES

Pub. No.:    WO/2018/197008    International Application No.:    PCT/EP2017/060239
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 29 01:59:59 CEST 2017
IPC: C23C 14/56
C23C 14/12
H01L 51/56
C23C 16/44
Applicants: APPLIED MATERIALS, INC.
DIEGUEZ-CAMPO, Jose Manuel
KELLER, Stefan
LEE, Jae Won
ANJIKI, Takashi
HAAS, Dieter
Inventors: DIEGUEZ-CAMPO, Jose Manuel
KELLER, Stefan
LEE, Jae Won
ANJIKI, Takashi
HAAS, Dieter
Title: METHOD FOR CLEANING A VACUUM SYSTEM USED IN THE MANUFACTURE OF OLED DEVICES, METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES, AND APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE TO MANUFACTURE OLED DEVICES
Abstract:
The present disclosure provides a method (100) for cleaning a vacuum system used in the manufacture of OLED devices. The method (100) includes performing pre-cleaning for cleaning at least a portion of the vacuum system, and performing plasma cleaning using a remote plasma source.