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1. (WO2018197007) APPARATUS FOR USE IN THE MANUFACTURE OF A SOLAR CELL, SYSTEM FOR DEPOSITION OF A MATERIAL ON A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A DEPOSITION MATERIAL USED IN THE MANUFACTURE OF A SOLAR CELL

Pub. No.:    WO/2018/197007    International Application No.:    PCT/EP2017/060238
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 29 01:59:59 CEST 2017
IPC: H01L 31/18
B41F 15/42
Applicants: APPLIED MATERIALS ITALIA S.R.L.
Inventors: BACCINI, Andrea
COLLA, Davide
GALIAZZO, Marco
DE SANTI, Luigi
Title: APPARATUS FOR USE IN THE MANUFACTURE OF A SOLAR CELL, SYSTEM FOR DEPOSITION OF A MATERIAL ON A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A DEPOSITION MATERIAL USED IN THE MANUFACTURE OF A SOLAR CELL
Abstract:
An apparatus (100) for use in the manufacture of a solar cell is provided. The apparatus (100) includes a first actuator (110), wherein a first material processing device (112) is connectable to the first actuator (110), and a second actuator (120). A second material processing device (122) is connectable to the second actuator (120). The second actuator (120) is connected to the first actuator (110). The first actuator (110) is configured to move the second actuator (120).