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1. (WO2018196753) HEATING DEVICE FOR PRE-HEATING CHAMBER BASED ON LPCVD
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Pub. No.: WO/2018/196753 International Application No.: PCT/CN2018/084288
Publication Date: 01.11.2018 International Filing Date: 24.04.2018
IPC:
C23C 16/48 (2006.01)
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44
characterised by the method of coating
48
by irradiation, e.g. photolysis, radiolysis, particle radiation
Applicants:
君泰创新(北京)科技有限公司 BEIJING JUNTAI INNOVATION TECHNOLOGY CO., LTD [CN/CN]; 中国北京市 大兴区亦庄经济技术开发区荣华南路9号院亦城科技中心2号楼11层 11th Fl., Bldg. 2, Yicheng Science and Technology Center, No. 9, South Ronghua Road, Yizhuang Economic-Technological Development Zone, Daxing Dist. Beijing 100176, CN
Inventors:
马峥 MA, Zheng; CN
Agent:
北京律智知识产权代理有限公司 BEIJING INTELLEGAL INTELLECTUAL PROPERTY AGENT LTD.; 中国北京市 朝阳区慧忠路5号B1605、B1606、B1607 B1605, B1606, B1607, No. 5 Huizhong Road, Chaoyang District Beijing 100101, CN
Priority Data:
201720434689.824.04.2017CN
Title (EN) HEATING DEVICE FOR PRE-HEATING CHAMBER BASED ON LPCVD
(FR) DISPOSITIF CHAUFFANT DESTINÉ À UNE CHAMBRE DE PRÉCHAUFFAGE REPOSANT SUR LE LPCVD
(ZH) 一种基于LPCVD预热腔的加热装置
Abstract:
(EN) Disclosed is a heating device for a pre-heating chamber based on LPCVD. The heating device is provided in a pre-heating chamber, and used for heating a glass substrate. The heating device comprises: a temperature collector, a heating module and a controller connected to the heating module, wherein the temperature collector is connected to the controller and used for collecting the temperature of the heating module; the heating module comprises several transverse temperature control areas and several longitudinal temperature control areas, each of the transverse temperature control areas and each of the longitudinal temperature control areas being respectively provided with a carbon medium wave infrared light tube; each carbon medium wave infrared light tube of each transverse temperature control area is perpendicular to the cross section at an opening of the pre-heating chamber; each carbon medium wave infrared light tube of each longitudinal temperature control area is parallel to the cross section at the opening of the pre-heating chamber; and the shape of the carbon medium wave infrared light tube of the longitudinal temperature control area corresponding to the position of a warping part of the glass substrate matches the degree of warping of the warping part, thereby enabling uniform heating of a glass substrate with a warping part.
(FR) L'invention concerne un dispositif chauffant destiné à une chambre de préchauffage reposant sur le dépôt chimique en phase vapeur sous pression réduite (LPCVD). Le dispositif chauffant est disposé dans une chambre de préchauffage, et destiné à chauffer un substrat en verre. Le dispositif chauffant comprend : un collecteur de température, un module chauffant et un dispositif de commande lié au module chauffant, le collecteur de température étant relié au dispositif de commande et destiné à collecter la température du module chauffant ; le module chauffant comprend plusieurs zones de commande de température transversales et plusieurs zones de commande de température longitudinales, chacune des zones de commande de température transversales et chacune des zones de commande de température longitudinales étant respectivement dotée d'un tube en carbone de lumière infrarouge à onde moyenne ; chaque tube en carbone de lumière infrarouge à onde moyenne de chaque zone de commande de température transversale est perpendiculaire à la section transversale au niveau d'une ouverture de la chambre de préchauffage ; chaque tube en carbone de lumière infrarouge à onde moyenne de chaque zone de commande de température longitudinale est parallèle à la section transversale au niveau de l'ouverture de la chambre de préchauffage ; et la forme du tube en carbone de lumière infrarouge à onde moyenne de la zone de commande de température longitudinale correspondant à la position d'une partie gauchissement du substrat de verre correspond au degré de gauchissement de la partie gauchissement, permettant ainsi un chauffage uniforme d'un substrat en verre présentant une partie gauchissement.
(ZH) 一种基于LPCVD预热腔的加热装置,该加热装置设置在预热腔内,用于加热玻璃基板,加热装置包括:温度采集器、加热模块及与加热模块连接的控制器,其中,温度采集器与控制器连接,用于采集加热模块的温度,加热模块包括若干横向控温区和若干纵向控温区,各横向控温区和各纵向控温区分别设置有碳中波红外灯管;各横向控温区的各碳中波红外灯管与预热腔的开口处的横截面垂直;各纵向控温区的各碳中波红外灯管与预热腔的开口处的横截面平行;且与玻璃基板的翘曲部位置对应的纵向控温区的碳中波红外灯管的形状与翘曲部的翘曲度匹配,从而能够给存在翘曲部的玻璃基板均匀加热。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)