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1. (WO2018196034) APPARATUS AND METHOD FOR INSPECTING A LIGHT TRANSMISSIVE OPTICAL COMPONENT

Pub. No.:    WO/2018/196034    International Application No.:    PCT/CN2017/083450
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue May 09 01:59:59 CEST 2017
IPC: G01M 11/02
G01N 21/958
Applicants: HONG KONG APPLIED SCIENCE AND TECHNOLOGY RESEARCH INSTITUTE COMPANY LIMITED
Inventors: NIKITIN, Vladislav
LIU, Ying
WU, Changli
Title: APPARATUS AND METHOD FOR INSPECTING A LIGHT TRANSMISSIVE OPTICAL COMPONENT
Abstract:
An apparatus (10), system and method for inspecting a light transmissive optical component (5) are provided. The apparatus (10) comprises an image capturing module (20) arranged on a first side of a support (30) configured to hold a light transmissive optical component (5) whilst it is being inspected. One or more first illuminating means (40) are arranged on the first side of the support (30) and adapted to illuminate from a first side of a light transmissive optical component (5) held by said support (30). One or more second illuminating means (50) are arranged on a second side of the support (30) and adapted to illuminate from a second side of the light transmissive optical component (5) held by said support (30), the second side of the support (30) opposing the first side of said support (30). One or more third illuminating means (60) arranged on the second side of the support (30) and adapted to provide transmissive illumination at the second side of the light transmissive optical component (5) held by the support (30), the third illuminating means (60) comprises one or more of an illuminating surface (64) and a light blocking surface (62) selectively operable and are arranged to face and substantially align with the second illuminating means (50) on the second side of the support (30). The one or more first illuminating means (40), the one or more second illuminating means (50) and the one or more third illuminating means (60) are adapted to be selectively switched on to enable the image capturing module (20) to capture one or more bright field images and dark field images of the light transmissive optical component (5) held by the support (30).