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1. WO2018195108 - NANOWIRE-MESH TEMPLATED GROWTH OF OUT-OF-PLANE THREE-DIMENSIONAL FUZZY GRAPHENE

Publication Number WO/2018/195108
Publication Date 25.10.2018
International Application No. PCT/US2018/028013
International Filing Date 17.04.2018
IPC
B29C 64/10 2017.1
BPERFORMING OPERATIONS; TRANSPORTING
29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
64Additive manufacturing, i.e. manufacturing of three-dimensional objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
10Processes of additive manufacturing
C01B 32/186 2017.1
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF
32Carbon; Compounds thereof
15Nanosized carbon materials
182Graphene
184Preparation
186by chemical vapour deposition
B33Y 50/02 2015.1
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
50Data acquisition or data processing for additive manufacturing
02for controlling or regulating additive manufacturing processes
CPC
B33Y 80/00
BPERFORMING OPERATIONS; TRANSPORTING
33ADDITIVE MANUFACTURING TECHNOLOGY
YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
80Products made by additive manufacturing
C01B 2204/02
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2204Structure or properties of graphene
02Single layer graphene
C01B 2204/04
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
2204Structure or properties of graphene
04Specific amount of layers or specific thickness
C01B 32/186
CCHEMISTRY; METALLURGY
01INORGANIC CHEMISTRY
BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; ; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
32Carbon; Compounds thereof
15Nano-sized carbon materials
182Graphene
184Preparation
186by chemical vapour deposition [CVD]
C23C 16/26
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
22characterised by the deposition of inorganic material, other than metallic material
26Deposition of carbon only
C23C 16/50
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
50using electric discharges
Applicants
  • CARNEGIE MELLON UNIVERSITY [US]/[US]
Inventors
  • GARG, Raghav
  • RASTOGI, Sahil, Kumar
  • COHEN-KARNI, Tzahi
  • SAN ROMAN, Daniel, J.
  • PANAT, Rahul
Agents
  • OBERDICK, David, G.
  • MONYOK, Michael, G.
Priority Data
62/602,21817.04.2017US
Publication Language English (en)
Filing Language English (EN)
Designated States
Title
(EN) NANOWIRE-MESH TEMPLATED GROWTH OF OUT-OF-PLANE THREE-DIMENSIONAL FUZZY GRAPHENE
(FR) CROISSANCE STRUCTURÉE À MAILLAGE DE NANOFILS DE GRAPHÈNE FLOU TRIDIMENSIONNEL HORS PLAN
Abstract
(EN) Disclosed herein are methods of synthesizing a hybrid nanomaterial comprising 3D out-of-plane single- to few-layer fuzzy graphene on a scaffold, such as a Si nanowire mesh through a plasma-enhanced chemical vapor deposition process. By varying graphene growth conditions (CH4 partial pressure and process time), the size, density, and electrical properties of the hybrid nanomaterial can be controlled. Porous nanowire-templated 3D graphene hybrid nanomaterials exhibit high electrical conductivity and also demonstrate exceptional electrochemical functionality.
(FR) Procédés de synthèse d'un nanomatériau hybride comprenant du graphène flou à couche unique à peu de couches hors plan 3D sur un échafaudage, tel qu'un maillage de nanofils de Si par l'intermédiaire d'un procédé de dépôt chimique en phase vapeur assisté par plasma. Grâce à la variation des conditions de croissance de graphène (pression partielle CH4 et temps de traitement), la taille, la densité et les propriétés électriques du nanomatériau hybride peuvent être commandées. Les nanomatériaux hybrides de graphène 3D à structure de nanofils poreux présentent une conductibilité électrique élevée et présentent également une fonctionnalité électrochimique exceptionnelle.
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