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1. (WO2018185839) SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

Pub. No.:    WO/2018/185839    International Application No.:    PCT/JP2017/014100
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Wed Apr 05 01:59:59 CEST 2017
IPC: H01L 21/338
H01L 29/812
Applicants: MITSUBISHI ELECTRIC CORPORATION
三菱電機株式会社
Inventors: MAEDA, Kazuhiro
前田 和弘
HISAKA, Takayuki
日坂 隆行
KURUSU, Hitoshi
久留須 整
Title: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
Abstract:
A multi-finger transistor having a plurality of control electrodes (2), a plurality of first electrodes (3), and a plurality of second electrodes (4) is formed on a semiconductor substrate (1). The transistor is covered with resin films (14, 15). First wiring (8) that electrically connects the first electrodes (3) to each other is formed on the resin films (14, 15). Contact portions between the first wiring (8) and the first electrodes (3) are covered with the resin films (14, 15). A hollow structure (16) hermetically sealed by the resin films (14, 15) is formed around the control electrodes (2) and the second electrodes (4).