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1. (WO2018185836) ATMOSPHERIC PRESSURE PLASMA DEVICE

Pub. No.:    WO/2018/185836    International Application No.:    PCT/JP2017/014091
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Wed Apr 05 01:59:59 CEST 2017
IPC: H05H 1/00
Applicants: FUJI CORPORATION
株式会社FUJI
Inventors: JINDO, Takahiro
神藤 高広
IKEDO, Toshiyuki
池戸 俊之
NIWA, Akihiro
丹羽 陽大
Title: ATMOSPHERIC PRESSURE PLASMA DEVICE
Abstract:
There is a need for a useful atmospheric pressure plasma device in which the pressure inside a gas pipe is detected by a pressure sensor, and a determination unit determines the state of the device according to the pressure within the gas pipe having deviated from a nominal value. This atmospheric pressure plasma device comprises: a plasma jetting head; a gas pipe which supplies gas to the plasma jetting head; a flowrate control gauge which controls the flowrate of gas which is fed to the gas pipe; a pressure sensor which is provided on the downstream side X of the flowrate control gauge, and which detects the pressure inside the gas pipe; and a determination unit which determines the state of the device according to the pressure within the gas pipe which is stipulated for each flowrate of gas supplied having deviated from a nominal value. As a result of this configuration, it is possible to identify gas leakages in the atmospheric pressure plasma device. It is also possible to determine whether plasma is being generated in a satisfactory state.