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1. (WO2018185835) PLASMA GENERATION SYSTEM

Pub. No.:    WO/2018/185835    International Application No.:    PCT/JP2017/014090
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Wed Apr 05 01:59:59 CEST 2017
IPC: H05H 1/00
H05H 1/26
Applicants: FUJI CORPORATION
株式会社FUJI
Inventors: JINDO, Takahiro
神藤 高広
IKEDO, Toshiyuki
池戸 俊之
Title: PLASMA GENERATION SYSTEM
Abstract:
Provided is a plasma generation system with which it is possible to more accurately measure the actual temperature of plasma gas which is jetted onto a body to be treated. This plasma generation system comprises: a jetting head which generates a plasma gas obtained by plasmafying a process gas by supplying electric power to electrodes provided to a reaction chamber, and jets the generated plasma gas onto the body to be treated; and a temperature sensor which detects the temperature of the plasma gas and outputs a detection signal according to the detected temperature. The temperature sensor is positioned in a position a distance away from the jetting port which jets the plasma gas of the jetting head, and which jets the plasma gas from the jetting head. The jetting head is constituted so as to be able to move between the body to be treated and the temperature sensor.