Search International and National Patent Collections

1. (WO2018185469) PURGE GAS FEEDING MEANS, ABATEMENT SYSTEMS AND METHODS OF MODIFYING ABATEMENT SYSTEMS

Pub. No.:    WO/2018/185469    International Application No.:    PCT/GB2018/050844
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Thu Mar 29 01:59:59 CEST 2018
IPC: B01D 53/75
C23C 16/44
F23G 7/06
Applicants: EDWARDS LIMITED
Inventors: SEELEY, Andrew
PRICE, Duncan Michael
Title: PURGE GAS FEEDING MEANS, ABATEMENT SYSTEMS AND METHODS OF MODIFYING ABATEMENT SYSTEMS
Abstract:
A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.