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1. (WO2018184934) OPTICAL ARRANGEMENT FOR LASER-INTERFERENCE STRUCTURING OF A SPECIMEN

Pub. No.:    WO/2018/184934    International Application No.:    PCT/EP2018/057895
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Thu Mar 29 01:59:59 CEST 2018
IPC: G02B 27/09
B23K 26/067
G02B 27/10
G03F 7/20
Applicants: FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
Inventors: KUNZE, Tim
LASAGNI, Andrés-Fabián
Title: OPTICAL ARRANGEMENT FOR LASER-INTERFERENCE STRUCTURING OF A SPECIMEN
Abstract:
The present invention relates to an optical arrangement and a method for laser-interference structuring of a specimen (10). The optical arrangement comprises a laser radiation source (1) for emitting a laser beam (11), a beam splitter element (4), which splits the laser beam (11) into two part beams (12, 13) such that one of the two part beams (12, 13) passes through a longer path within the beam splitter element (4) than the other part beam (12, 13), a deflecting element (5), which deflects one of the two part beams (12, 13) in such a manner that the two part beams (12, 13) run substantially parallel to one another, and a focussing element (9), through which the two substantially parallel-running part beams (12, 13) pass such that the part beams (12, 13) interfere on a surface of the specimen (10).