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1. (WO2018184917) METHOD FOR PRODUCING AN OUTPUT COUPLING ELEMENT FOR AN OPTOELECTRONIC COMPONENT, AND OPTOELECTRONIC COMPONENT

Pub. No.:    WO/2018/184917    International Application No.:    PCT/EP2018/057785
Publication Date: Fri Oct 12 01:59:59 CEST 2018 International Filing Date: Wed Mar 28 01:59:59 CEST 2018
IPC: H01L 33/44
H01L 33/58
Applicants: OSRAM OPTO SEMICONDUCTORS GMBH
Inventors: EICHINGER, Christian
HACKENBERGER, Maja
Title: METHOD FOR PRODUCING AN OUTPUT COUPLING ELEMENT FOR AN OPTOELECTRONIC COMPONENT, AND OPTOELECTRONIC COMPONENT
Abstract:
The invention relates to a method for producing an output coupling element (2) for an optoelectronic component (100) having the following method steps: A) providing an inorganic dielectric element (3) having a surface (4) in a chamber (10), wherein the dielectric element rotates during operation (5), and B) providing a patterning means (6) comprising water (7) and ozone (8) and introducing the patterning means (6) into the chamber (10), so that the patterning means (6) touches the surface (4) of the inorganic dielectric element (3) and a roughening (9) is produced in the surface (4).