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|1. (WO2018182584) QUBIT DEVICES WITH SLOW WAVE RESONATORS|
|Inventors:||ROBERTS, Jeanette M.
CLARKE, James S.
ELSHERBINI, Adel A.
YOSCOVITS, Zachary R.
MICHALAK, David J.
GEORGE, Hubert C.
THOMAS, Nicole K.
|Title:||QUBIT DEVICES WITH SLOW WAVE RESONATORS|
Embodiments of the present disclosure propose new microwave resonator structures for providing microwave connectivity to, from, and/or between qubits, or to set the frequencies that address individual qubits. An exemplary proposed resonator structure includes a resonant microwave transmission line having periodic high-impedance and low-impedance sections along at least a portion of the entire length of the line. In some embodiments, such sections can be implemented by providing periodic conductive elements which are substantially perpendicular to a signal line of a microwave transmission line. In various embodiments, the periodic conductive elements may be provided either in the same plane as the signal line, or in a plane below the signal line and separated from the signal line by a dielectric material. Fabrication techniques for forming such resonators are also disclosed.