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1. (WO2018182505) MICRODEVICE MANUFACTURING SYSTEM

Pub. No.:    WO/2018/182505    International Application No.:    PCT/SG2017/050182
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Apr 01 01:59:59 CEST 2017
IPC: H01L 21/02
Applicants: NEITAS PTE. LTD.
Inventors: YOSHIDA, Masataka
Title: MICRODEVICE MANUFACTURING SYSTEM
Abstract:
An object is to efficiently manufacture microdevice with a small investment. Eight first microdevice manufacturing devices (2-1 to 2-8) perform processing in predetermined one or more steps among a plurality of steps for manufacturing a predetermined type of microdevice having a substrate of a predetermined size as one unit. One second microdevice manufacturing device (3) performs, as processing in predetermined one or more steps among the plurality of steps which are different from the one or more steps of the processing performed by the n microdevice manufacturing devices, collective processing on two or more units.