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1. (WO2018182167) MAGNET STRUCTURE, MAGNET UNIT AND MAGNETRON SPUTTERING DEVICE COMPRISING SAME

Pub. No.:    WO/2018/182167    International Application No.:    PCT/KR2018/001672
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Fri Feb 09 00:59:59 CET 2018
IPC: H01J 37/34
C23C 14/34
H01F 7/122
H01F 7/02
Applicants: ULVAC KOREA CO., LTD.
한국알박(주)
Inventors: KIM, Jung Gun
김정건
SO, Byung Ho
소병호
KIM, Sun Young
김선영
WOO, Chang Won
우창원
JO, Sung Ki
조성기
Title: MAGNET STRUCTURE, MAGNET UNIT AND MAGNETRON SPUTTERING DEVICE COMPRISING SAME
Abstract:
The present invention relates to a magnet and the like which can be used for a magnetron sputtering device. A magnet structure for a magnetron sputtering device of the present invention comprises: a permanent magnet; and a wire surrounding the permanent magnet.