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1. (WO2018181809) PROCESSING DEVICE AND PROCESSING METHOD

Pub. No.:    WO/2018/181809    International Application No.:    PCT/JP2018/013444
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Fri Mar 30 01:59:59 CEST 2018
IPC: H01L 21/306
B08B 3/02
H01L 21/208
H01L 21/304
Applicants: FLOSFIA INC.
株式会社FLOSFIA
Inventors: YAGYU Shingo
柳生 慎悟
HITORA Toshimi
人羅 俊実
Title: PROCESSING DEVICE AND PROCESSING METHOD
Abstract:
Provided are a processing device (system) and a processing method with which good quality roll-to-roll processing can be performed simply and easily on both sides of a substrate under atmospheric pressure. A processing device (system) for processing a substrate using a mist or liquid droplets including a processing agent is provided with an accumulation unit for accumulating the mist or liquid droplets, and an impregnation unit for impregnating the substrate with the accumulated mist or liquid droplets. Using the processing device, the mist or liquid droplets are accumulated, and the substrate is processed by impregnating the substrate with the accumulated mist or liquid droplets.