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1. (WO2018181510) ADHESIVE SHEET

Pub. No.:    WO/2018/181510    International Application No.:    PCT/JP2018/012837
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Thu Mar 29 01:59:59 CEST 2018
IPC: C09J 5/00
C09J 7/38
C09J 133/04
H01L 21/683
Applicants: LINTEC CORPORATION
リンテック株式会社
Inventors: UEMURA Kazue
上村 和恵
Title: ADHESIVE SHEET
Abstract:
The present invention pertains to an adhesive sheet 1 delamination method for delaminating the adhesive sheet 1 provided with at least an adhesive layer 2 and delaminating attaching bodies W, W' attached to the adhesive surface P of the adhesive layer 2, wherein the method is characterized in that: the adhesive layer 2 has a recess part 3 in the adhesive surface P; the attaching bodies W, W' are attached to the adhesive sheet 1 so that an independent space C is formed by the recess part 3 of the adhesive layer 2; a depressurizing process for expanding a gas inside the space C is performed on the adhesive sheet 1, to which at least the attaching bodies W, W' are attached, to thereby reduce the adhesion of the adhesive layer 2 and delaminate the adhesive sheet 1 and the attaching bodies W, W'. Through this method, the adhesion can be reduced at a desired timing by means of a novel acting mechanism.