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1. (WO2018181407) CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/181407 International Application No.: PCT/JP2018/012607
Publication Date: 04.10.2018 International Filing Date: 27.03.2018
IPC:
H01J 37/22 (2006.01) ,H01J 37/317 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
02
Details
22
Optical or photographic arrangements associated with the tube
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30
Electron-beam or ion-beam tubes for localised treatment of objects
317
for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation
Applicants: HITACHI HIGH-TECH SCIENCE CORPORATION[JP/JP]; 24-14, Nishi-Shimbashi 1-chome, Minato-ku, Tokyo 1050003, JP
Inventors: MAN Xin; JP
AZUMA Junzo; JP
Agent: Eikoh Patent Firm, P.C.; JP
Priority Data:
2017-06090127.03.2017JP
Title (EN) CROSS-SECTION OBSERVATION DEVICE, AND CONTROL METHOD
(FR) DISPOSITIF D’OBSERVATION DE SECTION TRANSVERSALE ET PROCÉDÉ DE COMMANDE
(JA) 断面観察装置、及び制御方法
Abstract:
(EN) This cross-section observation device bombards an object with a charged particle beam to repeatedly expose cross-sections of the object, bombards at least some of the cross-sections from among the plurality of the exposed cross-sections with a charged particle beam to acquire cross-sectional image information describing each of the at least some of the cross-sections, generates for each of these cross-sections a cross-sectional image described by the cross-sectional image information acquired, and generates a three-dimensional image in which the generated cross-sectional images are stacked together. This cross-section observation device displays a first three-dimensional image along with a second three-dimensional image, the first three-dimensional image being a three-dimensional image from the stacking of first cross-sectional images, which are cross-sectional images of the cross-sections described by the corresponding cross-sectional image information acquired on the basis of a first condition, and the second three-dimensional image being a three-dimensional image from the stacking of second cross-sectional images, which are cross-sectional images of the cross-sections described by the corresponding cross-sectional image information acquired on the basis of a second condition.
(FR) La présente invention concerne un dispositif d’observation de section transversale qui projette sur un objet un faisceau de particules chargées pour exposer de façon répétée des sections transversales de l’objet, bombarde au moins certaines des sections transversales parmi la pluralité de sections transversales exposées avec un faisceau de particules chargées pour acquérir des informations d’image de section transversale décrivant chacune des au moins certaines sections transversales, génère pour chacune de ces sections transversales une image de section transversale décrite par les informations d’image de section transversale acquises, et génère une image tridimensionnelle dans laquelle les images de section transversale générées sont empilées conjointement. Ce dispositif d’observation de section transversale affiche une première image tridimensionnelle conjointement avec une deuxième image tridimensionnelle, la première image tridimensionnelle étant une image tridimensionnelle issue de l’empilement de premières images de section transversale, qui sont des images de section transversale des sections transversales décrites par les informations d’image de section transversale correspondantes acquises sur la base d’une première condition, et la deuxième image tridimensionnelle étant une image tridimensionnelle issue de l’empilement de deuxièmes images de section transversale, qui sont des images de section transversale des sections transversales décrites par les informations d’image de section transversale correspondantes acquises sur la base d’une deuxième condition.
(JA) 断面観察装置は、物体に荷電粒子ビームを照射して物体の断面を繰り返し露出させるとともに、露出させた複数の当該断面のうちの少なくとも一部の断面に荷電粒子ビームを照射して当該少なくとも一部の断面のそれぞれを表す断面像情報を取得し、取得した断面像情報のそれぞれが表す当該断面毎の断面像を生成し、生成した断面像のそれぞれを重ね合わせた三次元像を生成する断面観察装置であって、第1の条件に基づいて取得した断面像情報のそれぞれが表す当該断面の断面像である第1断面像を重ね合わせた三次元像である第1三次元像とともに、第2の条件に基づいて取得した断面像情報のそれぞれが表す当該断面の断面像である第2断面像を重ね合わせた三次元像である第2三次元像を表示する。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)