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1. (WO2018181273) PROBE, PROBE UNIT, AND SEMICONDUCTOR INSPECTION DEVICE PROVIDED WITH PROBE UNIT

Pub. No.:    WO/2018/181273    International Application No.:    PCT/JP2018/012350
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Wed Mar 28 01:59:59 CEST 2018
IPC: G01R 1/067
G01R 1/073
G01R 31/26
Applicants: NHK SPRING CO., LTD.
日本発條株式会社
Inventors: SOMA Kazuya
相馬 一也
TAKAHASHI Masahiro
高橋 雅宏
Title: PROBE, PROBE UNIT, AND SEMICONDUCTOR INSPECTION DEVICE PROVIDED WITH PROBE UNIT
Abstract:
The probe according to one embodiment of the present invention is provided with: a first plunger; a first end section having a first cutout for fitting in the first plunger; a first spiral section having a first spiral groove; and a first pipe having a first cylindrical section.