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1. (WO2018181205) PHOTOSENSITIVE ELEMENT

Pub. No.:    WO/2018/181205    International Application No.:    PCT/JP2018/012192
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Tue Mar 27 01:59:59 CEST 2018
IPC: G03F 7/09
G03F 7/004
G06F 3/041
Applicants: HITACHI CHEMICAL COMPANY, LTD.
日立化成株式会社
Inventors: YOSHIDA Hideki
吉田 英樹
MUKAI Ikuo
向 郁夫
Title: PHOTOSENSITIVE ELEMENT
Abstract:
This photosensitive element is provided with: a support film; and a photosensitive resin layer that is arranged on one surface of the support film. With respect to the one surface, the density of broken bubble marks is 6 marks/0.25 m2 or less; and the diameters of the broken bubble marks are from 40 μm to 100 μm (inclusive).