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|1. (WO2018181105) HEATER PIPE GAS LEAK DETECTING DEVICE AND HEATER PIPE GAS LEAK DETECTING METHOD|
|Applicants:||SHIBAURA MECHATRONICS CORPORATION
|Title:||HEATER PIPE GAS LEAK DETECTING DEVICE AND HEATER PIPE GAS LEAK DETECTING METHOD|
[Problem] To provide a heater pipe gas leak detecting device and a heater pipe gas leak detecting method with which it is possible for a leak of gas from a heater pipe in which fine holes are formed to be detected reliably. [Solution] According to one mode of embodiment of the present invention, a gas leak detecting device for a heater pipe 10 is provided with an inner pipe 10a accommodating a heater body, and an outer pipe 10b which encloses the inner pipe and is hermetically sealed, wherein a gas pressure in a space between the outer pipe 10b and the inner pipe 10a is regulated via a pipeline 30 to a prescribed pressure value by means of a pressure regulating mechanism 20. The gas leak detecting device comprises: a gas flow resistance portion 21 (213) which is provided in the pipeline 30 and locally makes it difficult for the gas to flow; a pressure detecting unit 23 which detects the gas pressure in the space between the outer pipe 10b and the inner pipe 10a, between the gas flow resistance portion 21 in the pipeline 30 and the heater pipe 10; and a leak determining means 50 for determining whether gas is leaking from the heater pipe 10, on the basis of a detected pressure value obtained by the pressure detecting unit 23.