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|1. (WO2018181000) WORKPIECE PROCESSING DEVICE AND MANUFACTURING METHOD FOR PROCESSED WORKPIECES|
|Applicants:||ORIGIN ELECTRIC COMPANY, LIMITED
|Title:||WORKPIECE PROCESSING DEVICE AND MANUFACTURING METHOD FOR PROCESSED WORKPIECES|
Provided are a workpiece processing device that includes a vaporizing device to vaporize a liquid to be vaporized having a comparatively large flow rate without requiring a carrier gas, and a manufacturing method for processed workpieces. A vaporizing device 1 comprises a vaporizing unit 10 that includes a heat storage body 11 having a heat capacity larger by a prescribed ratio than a carboxylic acid liquid Fq to be vaporized, and a heat supplier 20 that supplies heat to the vaporizing unit 10. The prescribed ratio is a heat capacity ratio in which a temperature decrease in the heat storage body 11 is within a predetermined range when the quantity of heat required when vaporizing the liquid Fq to be vaporized to a planned ratio by the liquid Fq to be vaporized flowing in a heat storage body channel 12 is transmitted from the heat storage body 11 to the liquid Fq to be vaporized. A workpiece processing device 100 comprises the vaporizing device 1, a chamber 5, and a vacuum pump 6 to create negative pressure in the chamber 5. A manufacturing method for processed workpieces performs prescribed processing on a workpiece W under the atmosphere of a processing gas Fg in the chamber 5 by loading the workpiece W into the chamber 5 and supplying the processing gas Fg generated with the vaporizing device 1 into the chamber 5.