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1. (WO2018180975) INORGANIC FILM AND GAS BARRIER FILM

Pub. No.:    WO/2018/180975    International Application No.:    PCT/JP2018/011677
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Mar 24 00:59:59 CET 2018
IPC: C23C 14/08
B32B 9/00
B32B 27/00
Applicants: SEKISUI CHEMICAL CO., LTD.
積水化学工業株式会社
Inventors: ASANO, Motohiko
浅野 元彦
Title: INORGANIC FILM AND GAS BARRIER FILM
Abstract:
One objective of the present invention is to provide an inorganic film that exhibits superior gas barrier properties and suppresses light transmittance from being degraded even when laminated with a resin material. Further, another objective of the present invention is to provide a gas barrier film having said inorganic film. The inorganic film of the present invention includes a double oxide including silicon (Si), carbon (C), zinc (Zn) and tin (Sn), wherein the carbon (C) concentration continuously increases in the film thickness direction from a central part of the film toward the surface of the film.