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1. (WO2018180969) OBJECT REPLACEMENT DEVICE, OBJECT PROCESSING DEVICE, PRODUCTION METHOD FOR FLAT PANEL DISPLAY, DEVICE PRODUCTION METHOD, OBJECT REPLACEMENT METHOD, AND OBJECT PROCESSING METHOD

Pub. No.:    WO/2018/180969    International Application No.:    PCT/JP2018/011656
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Mar 24 00:59:59 CET 2018
IPC: G03F 7/20
B65G 49/06
H01L 21/677
H01L 21/68
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: AOKI, Yasuo
青木保夫
USHIJIMA, Yasuyuki
牛島康之
Title: OBJECT REPLACEMENT DEVICE, OBJECT PROCESSING DEVICE, PRODUCTION METHOD FOR FLAT PANEL DISPLAY, DEVICE PRODUCTION METHOD, OBJECT REPLACEMENT METHOD, AND OBJECT PROCESSING METHOD
Abstract:
In order to shorten the time required for substrate replacement, this object replacement device comprises: a first support unit (68) that supports a first surface of an object (P1); a second support unit (152) that receives the object from the first support unit and supports a second surface differing to the first surface of the object; and a drive unit (43) that drives the first support unit (68), that has handed over the object to the second support unit, to an object replacement position at which an object (P2) different from the object is brought to the first support unit.