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1. (WO2018180968) ACTIVE MATRIX SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL

Pub. No.:    WO/2018/180968    International Application No.:    PCT/JP2018/011652
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Mar 24 00:59:59 CET 2018
IPC: G02F 1/1368
G09F 9/30
H01L 21/336
H01L 29/786
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: SUZUKI Masahiko
鈴木 正彦
KITAGAWA Hideki
北川 英樹
KIKUCHI Tetsuo
菊池 哲郎
ITOH Toshikatsu
伊藤 俊克
NISHIMIYA Setsuji
西宮 節治
UEDA Teruyuki
上田 輝幸
HARA Kengo
原 健吾
IMAI Hajime
今井 元
DAITOH Tohru
大東 徹
Title: ACTIVE MATRIX SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL
Abstract:
The active matrix substrate according to an embodiment of the present invention is provided with: a plurality of thin film transistors supported by a substrate; and an inorganic insulating layer covering the thin film transistors. Each of the thin film transistors has a gate electrode, oxide semiconductor layer, gate insulating layer, source electrode, and drain electrode. The gate insulating layer and/or inorganic insulating layer is a laminated insulating layer having a laminated structure including a silicon oxide layer and a silicon nitride layer. The laminated insulating layer also includes an intermediate layer that is provided between the silicon oxide layer and the silicon nitride layer, said intermediate layer having a refractive index nC, which is higher than a refractive index nA of the silicon oxide layer and lower than a refractive index nB of the silicon nitride layer.