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|1. (WO2018180968) ACTIVE MATRIX SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL|
|Applicants:||SHARP KABUSHIKI KAISHA
|Title:||ACTIVE MATRIX SUBSTRATE AND LIQUID CRYSTAL DISPLAY PANEL|
The active matrix substrate according to an embodiment of the present invention is provided with: a plurality of thin film transistors supported by a substrate; and an inorganic insulating layer covering the thin film transistors. Each of the thin film transistors has a gate electrode, oxide semiconductor layer, gate insulating layer, source electrode, and drain electrode. The gate insulating layer and/or inorganic insulating layer is a laminated insulating layer having a laminated structure including a silicon oxide layer and a silicon nitride layer. The laminated insulating layer also includes an intermediate layer that is provided between the silicon oxide layer and the silicon nitride layer, said intermediate layer having a refractive index nC, which is higher than a refractive index nA of the silicon oxide layer and lower than a refractive index nB of the silicon nitride layer.