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1. (WO2018180733) WAFER ACCOMMODATION CONTAINER

Pub. No.:    WO/2018/180733    International Application No.:    PCT/JP2018/010906
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Tue Mar 20 00:59:59 CET 2018
IPC: H01L 21/673
Applicants: ACHILLES CORPORATION
アキレス株式会社
Inventors: NISHIJIMA Masayuki
西島 正敬
HIROSE Kenichi
廣瀬 賢一
Title: WAFER ACCOMMODATION CONTAINER
Abstract:
A wafer accommodation container (1) provided with a container body (10) in which one end has an opening (11) and the other end has a mounting part (12) facing the opening (11) and having wafers stacked and accommodated thereon, a lid body (20) for covering the opening (11), and a retaining mechanism (30) for closely fitting and retaining the container body (10) and the lid body (20) so as to be capable of opening and closing, wherein: the retaining mechanism (30) has, in at least two locations, a locking member (32) that extends from the other end of the container body (10) to the one end and has a locking claw part (31) on one end part, and a locking hole part (33) provided to the lid body (20) and to which the locking claw part (31) is locked; and a guide member (40) is configured to be provided to a lid-body-side wall part (21), the guide member (40) guiding the container body (10) and the lid body (20) so as to retain the same in a concentric state while in contact with the locking member (32) when the lid body (20) is being closely fitted to the container body (10).