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1. (WO2018180373) CONVERSION JOINT, INTEGRATED FLUID SUPPLY DEVICE HAVING CONVERSION JOINT, AND FLUID PART MOUNTING METHOD

Pub. No.:    WO/2018/180373    International Application No.:    PCT/JP2018/009248
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Mar 10 00:59:59 CET 2018
IPC: H01L 21/3065
F16L 41/02
H01L 21/02
H01L 21/31
Applicants: FUJIKIN INCORPORATED
株式会社フジキン
Inventors: IWASAWA Ryosuke
岩沢 涼介
DOYA, Hidehiro
堂屋 英宏
Title: CONVERSION JOINT, INTEGRATED FLUID SUPPLY DEVICE HAVING CONVERSION JOINT, AND FLUID PART MOUNTING METHOD
Abstract:
In order to provide a conversion joint that allows use of a fluid part having a different size from a fluid part for a base block, a conversion joint according to the present invention is provided with: a first base portion disposed on a base block; a second base portion which is separated from the first base portion in a first direction away from the base block and in which a first fluid part having a different size from a fluid part provided on the base block is provided; an intermediate portion that connects the first base portion and the second base portion; a one end side channel that penetrates the second base portion, the intermediate portion, and the first base portion and that is connected to one end of a first channel of the base block; and the other end side channel that penetrates the second base portion, the intermediate portion, and the first base portion and that is connected to the other end of a second channel of the base block, wherein a first opening on the second base portion side of the one end side channel and a second opening on the second base portion side of the other end side channel are set to be able to be connected to a fluid inflow port of the first fluid part and a fluid outflow port of the first fluid part.