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1. (WO2018179859) SEMICONDUCTOR WAFER CONTAINER

Pub. No.:    WO/2018/179859    International Application No.:    PCT/JP2018/004019
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Wed Feb 07 00:59:59 CET 2018
IPC: H01L 21/673
B65D 85/30
Applicants: ACHILLES CORPORATION
アキレス株式会社
Inventors: NISHIJIMA, Masayuki
西島 正敬
HIROSE, Kenichi
廣瀬 賢一
JAMES, Christie
ジェームス クリスティー
Title: SEMICONDUCTOR WAFER CONTAINER
Abstract:
[Problem] To provide a semiconductor wafer container. [Solution] A semiconductor wafer container in which two substantially flat outer shells having the same shape are overlapped in a vertical direction and a single semiconductor wafer is stored, wherein: the outer shells have, in addition to a main body thereof, a wafer-holding means and an outer wall formation means; the wafer-holding means is for accommodating the upper and lower surfaces of the wafer in a substantially contactless manner and securing and holding the upper and lower surfaces, the wafer-holding means having an inclined surface formed on the upper surface of the outer shell, which comes into line contact with the outer peripheral edge of the semiconductor wafer from below, a wafer contact surface formed on the lower surface of the outer shell, which comes into surface contact with the outer peripheral edge of the semiconductor wafer from above, and a shallow-bottomed void part formed at the respective center part of both the upper and lower surfaces of the outer shell so as to be capable of accommodating the upper half or the lower half of the wafer; and the outer wall formation means has a hanging part formed on the outer peripheral edge of the lower surface of the outer shell so as to form, when the two outer shells are overlapped in the vertical direction and the semiconductor wafer is stored, a closed outer wall on the outside of the stored semiconductor wafer.