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1. (WO2018179807) RADIATION-SENSITIVE RESIN COMPOSITION AND ELECTRONIC COMPONENT

Pub. No.:    WO/2018/179807    International Application No.:    PCT/JP2018/003203
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Thu Feb 01 00:59:59 CET 2018
IPC: G03F 7/023
C07D 303/28
C08G 59/22
G03F 7/004
G03F 7/075
Applicants: ZEON CORPORATION
日本ゼオン株式会社
Inventors: FUJIMURA Makoto
藤村 誠
Title: RADIATION-SENSITIVE RESIN COMPOSITION AND ELECTRONIC COMPONENT
Abstract:
The purpose of the present invention is to provide a radiation-sensitive resin composition with which it is possible to form a resin film that sufficiently inhibits generation of development residues and that exhibits superior elongation properties. The radiation-sensitive resin composition according to the present invention comprises a cyclic olefin polymer (A-1) having a protonic polar group, a cyclic olefin polymer (A-2) having a protonic polar group, a bifunctional epoxy compound (B), and a radiation-sensitive compound (C), wherein the cyclic olefin polymer (A-1) has a weight average molecular weight of not less than 1,000 but less than 10,000; the cyclic olefin polymer (A-2) has a weight average molecular weight of 10,000-100,000; and the contained amount of the cyclic olefin polymer (A-2) accounts for 5-55 mass% of the total contained amount of the cyclic olefin polymer (A-1) and the cyclic olefin polymer (A-2).