Search International and National Patent Collections
Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018179641) PHOTOSENSITIVE TRANSFERRING MATERIAL AND METHOD FOR PRODUCING CIRCUIT WIRING
Latest bibliographic data on file with the International BureauSubmit observation

Pub. No.: WO/2018/179641 International Application No.: PCT/JP2017/046479
Publication Date: 04.10.2018 International Filing Date: 25.12.2017
IPC:
G03F 7/039 (2006.01) ,C08F 12/08 (2006.01) ,C08F 20/16 (2006.01) ,G03F 7/004 (2006.01) ,G03F 7/20 (2006.01)
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
039
Macromolecular compounds which are photodegradable, e.g. positive electron resists
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
12
Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
02
Monomers containing only one unsaturated aliphatic radical
04
containing one ring
06
Hydrocarbons
08
Styrene
C CHEMISTRY; METALLURGY
08
ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
F
MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
20
Homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride, ester, amide, imide, or nitrile thereof
02
Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
10
Esters
12
of monohydric alcohols or phenols
16
of phenols or of alcohols containing two or more carbon atoms
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
004
Photosensitive materials
04
Chromates
G PHYSICS
03
PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
7
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
20
Exposure; Apparatus therefor
Applicants:
富士フイルム株式会社 FUJIFILM CORPORATION [JP/JP]; 東京都港区西麻布2丁目26番30号 26-30, Nishiazabu 2-chome, Minato-ku, Tokyo 1068620, JP
Inventors:
藤本 進二 FUJIMOTO, Shinji; JP
松田 知樹 MATSUDA, Tomoki; JP
山田 悟 YAMADA, Satoru; JP
Agent:
特許業務法人太陽国際特許事務所 TAIYO, NAKAJIMA & KATO; 東京都新宿区新宿4丁目3番17号 3-17, Shinjuku 4-chome, Shinjuku-ku, Tokyo 1600022, JP
Priority Data:
2017-06804330.03.2017JP
Title (EN) PHOTOSENSITIVE TRANSFERRING MATERIAL AND METHOD FOR PRODUCING CIRCUIT WIRING
(FR) MATÉRIAU DE TRANSFERT PHOTOSENSIBLE ET PROCÉDÉ DE PRODUCTION DE CÂBLAGE DE CIRCUIT
(JA) 感光性転写材料、及び回路配線の製造方法
Abstract:
(EN) Disclosed is a photosensitive transferring material comprising: a temporary support; and a photosensitive resin composition layer including a photoacid generator, and a polymer component including a polymer that includes a constituent unit (a-1) including a group wherein a carboxy group is protected in the form of an acetal, or a constituent unit (a-2) including a group in which a phenolic hydroxyl group is protected in the form of an acetal. The polymer component includes a constituent unit (b-1) including a phenolic hydroxyl group and/or a constituent unit (b-2) including an alcoholic hydroxyl group. The total percentage of the constituent unit (b-1) and the constituent unit (b-2) in all of the constituent units in the polymer component is from 1 mol% to 18 mol%. Also disclosed is a method for producing a circuit wiring using the photosensitive transferring material.
(FR) L'invention concerne un matériau de transfert photosensible comprenant : un support temporaire ; et une couche de composition de résine photosensible comprenant un générateur photoacide, et un composant polymère comprenant un polymère qui comprend une unité constitutive (a-1) comprenant un groupe dans lequel un groupe carboxy est protégé sous la forme d'un acétal, ou une unité constitutive (a-2) comprenant un groupe dans lequel un groupe hydroxyle phénolique est protégé sous la forme d'un acétal. Le composant polymère comprend une unité constitutive (b-1) comprenant un groupe hydroxyle phénolique et/ou une unité constitutive (b-2) comprenant un groupe hydroxyle alcoolique. Le pourcentage total de l'unité constitutive (b-1) et de l'unité constitutive (b-2) dans toutes les unités constitutives dans le composant polymère est de 1 % en moles à 18 % en moles. L'invention concerne également un procédé de production d'un câblage de circuit à l'aide du matériau de transfert photosensible.
(JA) 仮支持体;及び、カルボキシ基がアセタールの形で保護された基を有する構成単位(a-1)又はフェノール性水酸基がアセタールの形で保護された基を有する構成単位(a-2)を有する重合体を含む重合体成分と、光酸発生剤とを含有する感光性樹脂組成物層;を有し、重合体成分が、フェノール性水酸基を有する構成単位(b-1)及びアルコール性水酸基を有する構成単位(b-2)の少なくとも一方を有し、重合体成分の全構成単位に占める構成単位(b-1)の割合と構成単位(b-2)の割合との合計が1モル%以上18モル%以下である感光性転写材料、並びに、感光性転写材料を用いた回路配線の製造方法。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)