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1. (WO2018179589) OPTICAL SCANNING DEVICE AND METHOD OF MANUFACTURE THEREFOR
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/179589 International Application No.: PCT/JP2017/043302
Publication Date: 04.10.2018 International Filing Date: 01.12.2017
IPC:
G02B 26/10 (2006.01) ,B81B 3/00 (2006.01) ,B81C 1/00 (2006.01) ,G02B 26/08 (2006.01)
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
10
Scanning systems
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
3
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
1
Manufacture or treatment of devices or systems in or on a substrate
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
26
Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
08
for controlling the direction of light
Applicants: MITSUBISHI ELECTRIC CORPORATION[JP/JP]; 7-3, Marunouchi 2-chome, Chiyoda-ku, Tokyo 1008310, JP
Inventors: KONNO, Nobuaki; JP
HIRATA, Yoshiaki; JP
ITO, Takahiko; JP
Agent: FUKAMI PATENT OFFICE, P.C.; Nakanoshima Festival Tower West, 2-4, Nakanoshima 3-chome, Kita-ku, Osaka-shi, Osaka 5300005, JP
Priority Data:
2017-06810530.03.2017JP
Title (EN) OPTICAL SCANNING DEVICE AND METHOD OF MANUFACTURE THEREFOR
(FR) DISPOSITIF DE BALAYAGE OPTIQUE ET SON PROCÉDÉ DE FABRICATION
(JA) 光走査装置およびその製造方法
Abstract:
(EN) An optical scanning device (1) comprises a mirror (3) and a driving beam (7). The driving beam (7) includes a piezoelectric part (12). The piezoelectric part (12) is structured with a piezoelectric body (15) divided into a plurality of sections by a plurality of first grooves. The length in the X axis direction of a section in the piezoelectric body (15) decreases as the section approaches the end of the piezoelectric body connected to an anchor (11) and decreases as the section approaches the end of the piezoelectric body connected to a link beam (9).
(FR) La présente invention concerne un dispositif de balayage optique (1) comprenant un miroir (3) et un faisceau d'entraînement (7). Le faisceau d'entraînement (7) comprend une partie piézoélectrique (12). La partie piézoélectrique (12) est structurée au moyen d'un corps piézoélectrique (15) divisé en une pluralité de sections par une pluralité de premières rainures. La longueur dans la direction de l'axe X d'une section dans le corps piézoélectrique (15) diminue à mesure que la section s'approche de l'extrémité du corps piézoélectrique reliée à un ancrage (11) et diminue à mesure que la section s'approche de l'extrémité du corps piézoélectrique reliée à un faisceau de liaison (9).
(JA) 光走査装置(1)は、ミラー(3)と駆動梁(7)とを備えている。駆動梁(7)は、圧電部(12)を備えている。圧電部(12)では、複数の第1溝によって、圧電体(15)が複数に区画されている。アンカー(11)に接続されている一端側に近づくにしたがって、圧電体(15)のX軸方向の長さが短くなるように形成され、リンク梁(9)に接続されている他端側に近づくにしたがって、圧電体(15)のX軸方向の長さが短くなるように形成されている。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)