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1. (WO2018179264) FILM FORMING INSTRUMENT, FILM FORMING METHOD, ELECTRONIC DEVICE, AND PRODUCTION INSTRUMENT FOR ELECTRONIC DEVICE

Pub. No.:    WO/2018/179264    International Application No.:    PCT/JP2017/013354
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Fri Mar 31 01:59:59 CEST 2017
IPC: B05C 5/00
B05D 1/26
B41J 2/01
G09F 9/00
G09F 9/30
H01L 21/336
H01L 27/32
H01L 29/786
H01L 51/50
H05B 33/04
H05B 33/06
H05B 33/10
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: HIRUOKA, Masaki
昼岡 正樹
Title: FILM FORMING INSTRUMENT, FILM FORMING METHOD, ELECTRONIC DEVICE, AND PRODUCTION INSTRUMENT FOR ELECTRONIC DEVICE
Abstract:
Provided is a film forming instrument (1) comprising an ejection unit (44a) that ejects a first droplet material and an ejection unit (44b) that ejects a second droplet material having a higher viscosity than the first droplet material, the first and second droplet materials being ejected so that a first film formed by application of the first droplet material and a second film formed by application of the second droplet material are adjacent to each other on a surface of an object to be coated.