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1. (WO2018179201) SUCTION APPARATUS, CARRIER APPARATUS, AND EL DEVICE MANUFACTURING APPARATUS

Pub. No.:    WO/2018/179201    International Application No.:    PCT/JP2017/013182
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Fri Mar 31 01:59:59 CEST 2017
IPC: H01L 21/683
B23Q 3/08
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: MASHIRO, Fumihiko
間城 文彦
Title: SUCTION APPARATUS, CARRIER APPARATUS, AND EL DEVICE MANUFACTURING APPARATUS
Abstract:
Provided is a suction apparatus capable of suppressing deformation of a subject, said deformation being occurred due to suction. A suction apparatus (100) is provided with one or more suction pads, and sucks a lower surface film (10) via the suction pads. The suction pads are formed of a porous material having an average pore diameter of 1.0 μm or less.