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1. (WO2018179201) SUCTION APPARATUS, CARRIER APPARATUS, AND EL DEVICE MANUFACTURING APPARATUS
Latest bibliographic data on file with the International Bureau

Pub. No.: WO/2018/179201 International Application No.: PCT/JP2017/013182
Publication Date: 04.10.2018 International Filing Date: 30.03.2017
IPC:
H01L 21/683 (2006.01) ,B23Q 3/08 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
683
for supporting or gripping
B PERFORMING OPERATIONS; TRANSPORTING
23
MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
Q
DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL, CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
3
Devices holding, supporting, or positioning, work or tools, of a kind normally removable from the machine
02
for mounting on a work-table, tool-slide, or analogous part
06
Work-clamping means
08
other than mechanically-actuated
Applicants:
シャープ株式会社 SHARP KABUSHIKI KAISHA [JP/JP]; 大阪府堺市堺区匠町1番地 1, Takumi-cho, Sakai-ku, Sakai City, Osaka 5908522, JP
Inventors:
間城 文彦 MASHIRO, Fumihiko; --
Agent:
特許業務法人HARAKENZO WORLD PATENT & TRADEMARK HARAKENZO WORLD PATENT & TRADEMARK; 大阪府大阪市北区天神橋2丁目北2番6号 大和南森町ビル Daiwa Minamimorimachi Building, 2-6, Tenjinbashi 2-chome Kita, Kita-ku, Osaka-shi, Osaka 5300041, JP
Priority Data:
Title (EN) SUCTION APPARATUS, CARRIER APPARATUS, AND EL DEVICE MANUFACTURING APPARATUS
(FR) APPAREIL D'ASPIRATION, APPAREIL SUPPORT ET APPAREIL DE FABRICATION DE DISPOSITIF ÉLECTROLUMINESCENT
(JA) 吸着装置、運搬装置、ELデバイス製造装置
Abstract:
(EN) Provided is a suction apparatus capable of suppressing deformation of a subject, said deformation being occurred due to suction. A suction apparatus (100) is provided with one or more suction pads, and sucks a lower surface film (10) via the suction pads. The suction pads are formed of a porous material having an average pore diameter of 1.0 μm or less.
(FR) L'invention concerne un appareil d'aspiration apte à supprimer la déformation d'un sujet, ladite déformation étant survenue en raison de l'aspiration. Un appareil d'aspiration (100) est pourvu d'une ou de plusieurs ventouses et aspire un film de surface inférieure (10) par l'intermédiaire des ventouses. Les ventouses sont formées d'un matériau poreux ayant un diamètre de pore moyen de 1,0 µm ou moins.
(JA) 吸着による対象物の変形を抑制できる吸着装置を提供する。 吸着装置(100)は、1つ以上の吸着パッドを備え、下面フィルム(10)を、前記吸着パッドを介して吸着する吸着装置であって、前記吸着パッドは、平均孔径が1.0μm以下である多孔質材料で形成されている。
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Organization (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)