Some content of this application is unavailable at the moment.
If this situation persist, please contact us atFeedback&Contact
1. (WO2018177922) MICROMECHANICAL PRESSURE SENSOR AND METHOD FOR PRODUCING SAID MICROMECHANICAL PRESSURE SENSOR
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/177922 International Application No.: PCT/EP2018/057433
Publication Date: 04.10.2018 International Filing Date: 23.03.2018
IPC:
G01L 19/14 (2006.01) ,B29C 45/14 (2006.01) ,B81B 7/00 (2006.01) ,G01L 9/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
19
Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
14
Housings
B PERFORMING OPERATIONS; TRANSPORTING
29
WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
C
SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
45
Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
14
incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
B PERFORMING OPERATIONS; TRANSPORTING
81
MICRO-STRUCTURAL TECHNOLOGY
B
MICRO-STRUCTURAL DEVICES OR SYSTEMS, e.g. MICRO-MECHANICAL DEVICES
7
Micro-structural systems
G PHYSICS
01
MEASURING; TESTING
L
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
Applicants:
ROBERT BOSCH GMBH [DE/DE]; Postfach 30 02 20 70442 Stuttgart, DE
Inventors:
DANNENBERG, Arne; DE
HENN, Tobias; DE
Priority Data:
10 2017 205 244.928.03.2017DE
Title (EN) MICROMECHANICAL PRESSURE SENSOR AND METHOD FOR PRODUCING SAID MICROMECHANICAL PRESSURE SENSOR
(FR) CAPTEUR DE PRESSION MICROMÉCANIQUE ET PROCÉDÉ DE FABRICATION DU CAPTEUR DE PRESSION MICROMÉCANIQUE
(DE) MIKROMECHANISCHER DRUCKSENSOR SOWIE VERFAHREN ZUR HERSTELLUNG DES MIKROMECHANISCHEN DRUCKSENSORS
Abstract:
(EN) The invention relates to a micromechanical pressure sensor (10), having a sensor core, formed in a silicon substrate (11) in a pressure-sensitive region (A), having a sensor membrane (12), wherein a first cavity (13) is formed in the silicon substrate (11) on the sensor membrane (12); a second cavity (18) formed between a rear-side surface of the silicon substrate (11) and the sensor core, wherein access holes (17) proceeding from the rear-side surface of the silicon substrate (11) are connected to the second cavity (18); and at least one anchoring recess (16) proceeding from the rear-side surface is formed in an anchoring region (B) of the silicon substrate (11) surrounding the pressure-sensitive region, wherein the anchoring recess (16) is designed such that a mold mass can flow into the anchoring recess (16).
(FR) L’invention concerne un capteur de pression (10) micromécanique, comprenant un noyau de capteur réalisé dans un substrat de silicium (11) dans une zone (A) sensible à la pression comportant une membrane de capteur (12), une première cavité (13) étant réalisée dans le substrat de silicium (11) contre la membrane de capteur (12) ; une deuxième cavité (18) réalisée entre une surface arrière du substrat de silicium (11) et le noyau de capteur, des trous d’accès (17) sortant de la surface arrière du substrat de silicium (11) étant reliés à la deuxième cavité (18) ; et au moins un creux d’ancrage (16) sortant de la surface arrière dans une zone d’ancrage (B) du substrat de silicium (11) entourant la zone sensible à la pression étant réalisé, le creux d’ancrage (16) étant réalisé de telle sorte qu’une masse moulée peut s’écouler dans le creux d’ancrage (16).
(DE) Mikromechanischer Drucksensor (10), aufweisend einen in einem Siliziumsubstrat (11) in einem drucksensitiven Bereich (A) ausgebildeten Sensorkern mit einer Sensormembran (12), wobei an der Sensormembran (12) eine erste Kavität (13) in dem Siliziumsubstrat (11) ausgebildet ist; eine zwischen einer rückseitigen Oberfläche des Siliziumsubstrat (11) und dem Sensorkern ausgebildete zweite Kavität (18), wobei von der rückseitigen Oberfläche des Siliziumsubstrats (11) ausgehende Zugangslöcher (17) mit der zweiten Kavität (18) verbunden sind; und mindestens eine von der rückseitigen Oberfläche ausgehende Verankerungsvertiefung (16) in einem den drucksensitiven Bereich umschließenden Verankerungsbereich (B) des Siliziumsubstrats (11) ausgebildet ist, wobei die Verankerungsvertiefung (16) so ausgebildet ist, dass eine Moldmasse in die Verankerungsvertiefung (16) fließen kann.
front page image
Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)