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1. (WO2018176069) FORCE SENSOR

Pub. No.:    WO/2018/176069    International Application No.:    PCT/AT2017/060082
Publication Date: Fri Oct 05 01:59:59 CEST 2018 International Filing Date: Sat Apr 01 01:59:59 CEST 2017
IPC: G01L 1/10
G01L 5/16
Applicants: TECHNISCHE UNIVERSITÄT WIEN
Inventors: DABSCH, Alexander
KEPLINGER, Franz
ROSENBERG, Christoph
Title: FORCE SENSOR
Abstract:
Force sensor (1) comprising a frame (2) and also an oscillation structure (4) which has a plurality of arms (3a-d) and can oscillate freely in the frame (2), wherein the arms (3a-d) are fixed to suspension regions (6a-d) of the frame (2) and run transverse to one another at least in sections, wherein at least one guiding means (5a-d) is provided, which guiding means extends along at least two arms (3a-b; 3b-c; 3c-d; 3d-a), wherein an AC voltage can be applied to the at least one guiding means (5a-d) in order to excite at least one oscillation mode of the oscillation structure (4) with a resonant frequency using Lorentz force (FL), wherein the force sensor (1) is designed such that the suspension regions (6a-d) are at least partially spatially displaced relative to one another when a force (7) is applied to the frame (2), that the magnitude of the spatial displacement (8) of the suspension regions (6a-d) depends on the magnitude of the force (7), that the spatial displacement (8) of the suspension regions (6a-d) causes detuning of the resonant frequency, the magnitude of which depends on the magnitude of the spatial displacement (8).