Search International and National Patent Collections

1. (WO2018166792) STAGE SYSTEM AND METROLOGY TOOL

Pub. No.:    WO/2018/166792    International Application No.:    PCT/EP2018/054890
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Thu Mar 01 00:59:59 CET 2018
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: HEMPENIUS, Peter, Paul
BAGGEN, Marcel, Koenraad, Marie
DE HOOG, Thomas, Jan
JULIANA, Sinar
VAN DE GROES, Henricus, Martinus, Johannes
Title: STAGE SYSTEM AND METROLOGY TOOL
Abstract:
Disclosed is a stage system and metrology apparatus comprising at least one such stage system. The stage system comprises a stage carrier for holding an object and a stage carrier positioning actuator for displacing the stage carrier. The stage system also comprises a balance mass to counteract a displacement of the stage carrier, and a balance mass positioning actuator for displacing the balance mass. A cable arrangement is connected to the stage carrier for the supply of at least power to said stage carrier. The stage system is operable to apply a compensatory feed-forward force to the balance mass which compensates for a cable arrangement force exerted by the cable arrangement.