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1. (WO2018166786) METHOD AND APPARATUS FOR CARRYING OUT A TIME-RESOLVED INTERFEROMETRIC MEASUREMENT

Pub. No.:    WO/2018/166786    International Application No.:    PCT/EP2018/054806
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Wed Feb 28 00:59:59 CET 2018
IPC: H01J 37/26
G01B 9/021
Applicants: TECHNISCHE UNIVERSITÄT BERLIN
Inventors: LEHMANN, Michael
NIERMANN, Tore
WAGNER, Tolga
Title: METHOD AND APPARATUS FOR CARRYING OUT A TIME-RESOLVED INTERFEROMETRIC MEASUREMENT
Abstract:
An embodiment of the invention relates to a method for carrying out a time-resolved interferometric measurement comprising the steps of generating at least two coherent waves, overlapping said at least two coherent waves and producing an interference pattern, measuring the interference pattern for a given exposure time, thereby forming measured interference values, and analyzing the measured interference values and extracting amplitude and/or phase information from the measured interference values. In at least one time segment, hereinafter referred to as disturbed time segment, of the expo- sure time, the interference pattern is intentionally disturbed or destroyed such that the corresponding measured interference values describe a disturbed or destroyed interference pattern. In at least one other time segment, hereinafter referred to as undisturbed time segment, of the exposure time, the interference pattern is undisturbed or at least less disturbed compared to the disturbed time segment such that the corresponding measured interference values describe an undisturbed or less disturbed interference pattern. The measured interference values that were measured during the entire given exposure time, are filtered, wherein those interference values that were measured during the at least one disturbed time segment, are reduced, suppressed or discarded. The filtered interference values are analyzed and the amplitude and/or phase information is extracted from the filtered interference values.