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1. (WO2018166777) MICROPHONE AND METHOD OF TESTING A MICROPHONE

Pub. No.:    WO/2018/166777    International Application No.:    PCT/EP2018/054655
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Tue Feb 27 00:59:59 CET 2018
IPC: H04R 19/00
H04R 29/00
Applicants: AMS INTERNATIONAL AG
Inventors: NIEDERBERGER, Mark
Title: MICROPHONE AND METHOD OF TESTING A MICROPHONE
Abstract:
The microphone comprises a housing (1, 2), which has an inner volume (12) filled with a gas, an opening (10) of the housing, an acoustic sensor (3) arranged in the housing, a diaphragm (13) of the acoustic sensor located above the opening, and a heater (14) in the inner volume. The acoustic sensor may especially comprise a microelectromechanical system. The gas is heated from inside the inner volume to increase the pressure and generate a corresponding signal of the acoustic sensor (3). This signal can be used for self-calibration of the sensitivity or for self-diagnostics to check the function of the microphone.