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1. (WO2018166772) METHOD AND APPARATUS FOR ALIGNING TWO OPTICAL SUBSYSTEMS

Pub. No.:    WO/2018/166772    International Application No.:    PCT/EP2018/054433
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Fri Feb 23 00:59:59 CET 2018
IPC: H01L 21/67
H01L 21/68
G03F 7/20
Applicants: EV GROUP E. THALLNER GMBH
Inventors: POVAZAY, Boris
Title: METHOD AND APPARATUS FOR ALIGNING TWO OPTICAL SUBSYSTEMS
Abstract:
A method and an apparatus for aligning two optical units are disclosed.