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1. (WO2018166757) AUTOMATED SUBSTRATE HOLDER LOADING DEVICE

Pub. No.:    WO/2018/166757    International Application No.:    PCT/EP2018/054024
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Tue Feb 20 00:59:59 CET 2018
IPC: H01L 21/677
Applicants: ATOTECH DEUTSCHLAND GMBH
Inventors: PRETSCHER, Rüdiger
BUCHBERGER, Daniel
Title: AUTOMATED SUBSTRATE HOLDER LOADING DEVICE
Abstract:
The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.