The invention relates to an arrangement (1) for TIRF microscopy, comprising an illumination optical unit having an illumination objective (2) for illuminating a sample (5) situated on a sample carrier (7) in a sample region of a sample plane (4) by means of an illumination beam path, wherein the optical axis (A1) of the illumination objective (2) forms an illumination angle (α1) different from zero with the normal (B) to the sample plane (4) with respect to which the sample carrier (7) is oriented. A detection optical unit having a detection objective (3) in a detection beam path forms a detection angle (α2) different from zero between the optical axis (A2) of said detection objective and the normal (B) to the sample plane (4). According to the invention, a transition element (10) is present between the sample carrier (7) and the objectives (2, 3), said transition element being arranged both in the illumination beam path (BS) and in the detection beam path (DS). The transition element (10) is configured for correcting aberrations that arise on account of the passage of radiation to be detected and/or of radiation for illuminating the sample (5) through media having different refractive indices. The illumination beam path is directed into the sample region of the sample plane (4) at an illumination angle (α1) suitable for producing a total internal reflection of the illumination radiation (BS) at the sample plane (4). The invention additionally relates to a microscope (0) comprising the arrangement (1) and to a method for TIRF microscopy.