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1. (WO2018166634) METHODS OF HANDLING A MASK DEVICE IN A VACUUM SYSTEM, MASK HANDLING APPARATUS, AND VACUUM SYSTEM

Pub. No.:    WO/2018/166634    International Application No.:    PCT/EP2017/058826
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Thu Apr 13 01:59:59 CEST 2017
IPC: H01L 21/677
Applicants: APPLIED MATERIALS,INC.
ZANG, Sebastian Gunther
SAUER, Andreas
Inventors: ZANG, Sebastian Gunther
SAUER, Andreas
Title: METHODS OF HANDLING A MASK DEVICE IN A VACUUM SYSTEM, MASK HANDLING APPARATUS, AND VACUUM SYSTEM
Abstract:
A method of handling a mask device configured for masked deposition on a substrate is described. The method includes: loading (Y1) a mask device (10) into a vacuum system (100); attaching (Y3) the mask device (10) to a mask carrier (15) in the vacuum system; and transporting the mask carrier (15) that holds the mask device (10) in a non-horizontal orientation along a transport path in the vacuum system (100). A further mask handling method includes: transporting a mask carrier (15) that holds a mask device (10) in a non- horizontal orientation (V) along a transport path in a vacuum system (100); detaching (X1) the mask device (10) from the mask carrier (15) in the vacuum system (100); and unloading (X3) the mask device (10) from the vacuum system (100). According to a further aspect, a mask handling assembly (20) for handling a mask device as well as a vacuum system with at least one mask handling assembly are described.