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1. (WO2018166622) METHODS OF OPERATING A VACUUM PROCESSING SYSTEM

Pub. No.:    WO/2018/166622    International Application No.:    PCT/EP2017/056385
Publication Date: Fri Sep 21 01:59:59 CEST 2018 International Filing Date: Sat Mar 18 00:59:59 CET 2017
IPC: C23C 14/56
C23C 16/54
H01L 21/677
H01L 21/67
Applicants: APPLIED MATERIALS, INC.
ZANG, Sebastian Gunther
SAUER, Andreas
Inventors: ZANG, Sebastian Gunther
SAUER, Andreas
Title: METHODS OF OPERATING A VACUUM PROCESSING SYSTEM
Abstract:
A method of operating a vacuum processing system (100, 200, 300) with a main transportation path (50) along which substrates can be transported in a main transportation direction (Z) is described. The method includes: (1a) routing a substrate (10) out of the main transportation path (50) into a first deposition module (D1) for depositing a first material on the substrate (10); (1b) routing the substrate (10) out of the main transportation path (50) into a second deposition module (D2) for depositing a second material on the substrate (10); and (1c) routing the substrate (10) out of the main transportation path (50) into one or more further deposition modules for depositing one or more further materials on the substrate (10). Further, various methods of operating one or more rotation modules of vacuum processing system configured for depositing two or more materials on a plurality of substrates are described.